Offermans, PeterPeterOffermansZhang 1, LeiLeiZhang 1De Heyn, PeterPeterDe HeynVaca Castano, GonzaloGonzaloVaca CastanoJanssen, SofieSofieJanssenBalakrishnan, SadhishkumarSadhishkumarBalakrishnanRottenberg, XavierXavierRottenbergVan Campenhout, JorisJorisVan Campenhout2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33686High conversion efficiency terahertz generation using antenna-coupled silicon integrated Ge photodiodesProceedings paperhttps://doi.org/10.1117/12.2513672