Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheets

Ramesh, SivaSivaRameshIvanov, TsvetanTsvetanIvanovPutcha, VamsiVamsiPutchaAlian, AliRezaAliRezaAlianSibaja-Hernandez, ArturoArturoSibaja-HernandezRooyackers, RitaRitaRooyackersCamerotto, ElisabethElisabethCamerottoMilenin, AlexeyAlexeyMileninPinna, NicoloNicoloPinnaEl Kazzi, SalimSalimEl KazziVeloso, AnabelaAnabelaVelosoLin, DennisDennisLinLagrain, PieterPieterLagrainFavia, PaolaPaolaFaviaCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe Meyer2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29263Record performance top-down In0.53Ga0.47As vertical nanowire FETs and vertical nanosheetsProceedings paperhttp://ieeexplore.ieee.org/document/8268406/