Park, SarohanSarohanParkDe Simone, DaniloDaniloDe SimoneTao, ZhengZhengTaoVandenberghe, GeertGeertVandenbergheHyun, YoonsukYoonsukHyunKim, Seo-MinSeo-MinKimLim, Chang-MoonChang-MoonLim2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25735EUV contact holes and pillars patteringProceedings paperhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2085920