ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis

Sajavaara, TimoTimoSajavaaraBrijs, BertBertBrijsGiangrandi, SimoneSimoneGiangrandiArstila, KaiKaiArstilaVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9542ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysisOral presentation