Ge1-xSnx stressors for strained-Ge CMOS

Takeuchi, ShotaroShotaroTakeuchiShimura, YosukeYosukeShimuraNishimura, T.T.NishimuraVincent, BenjaminBenjaminVincentEneman, GeertGeertEnemanClarysse, TrudoTrudoClarysseDemeulemeester, JelleJelleDemeulemeesterVantomme, AndreAndreVantommeDekoster, JohanJohanDekosterCaymax, MattyMattyCaymaxLoo, RogerRogerLooSakai, A.A.SakaiNakatsuka, OsakuOsakuNakatsukaZaima, ShigeakiShigeakiZaima2021-10-192021-10-1920110038-1101https://imec-publications.be/handle/20.500.12860/19860Ge1-xSnx stressors for strained-Ge CMOSJournal article