Advances on doping strategies for triple-gate FinFETs and lateral gate-all-around nanowire FETs and their impact on device performance

Veloso, AnabelaAnabelaVelosoDe Keersgieter, AnAnDe KeersgieterMatagne, PhilippePhilippeMatagneHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaert2021-10-242021-10-2420171369-8001https://imec-publications.be/handle/20.500.12860/29808Advances on doping strategies for triple-gate FinFETs and lateral gate-all-around nanowire FETs and their impact on device performanceJournal articlehttp://www.sciencedirect.com/science/article/pii/S1369800116304358