Holsteyns, FrankFrankHolsteynsLee, KuntackKuntackLeeGraf, S.S.GrafPalmans, RogerRogerPalmansVereecke, GuyGuyVereeckeMertens, PaulPaulMertens2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10601Megasonics: a cavitation driven processProceedings paper