Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster

Hemmes, K.K.HemmesHamstra, M. A.M. A.HamstraKoops, K. R.K. R.KoopsWind, M. M.M. M.WindSchram, TomTomSchramDe Laet, JanJanDe LaetBender, HugoHugoBender2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2623Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and fasterJournal article