Kunnen, EddyEddyKunnenRakhimova, TatyanaTatyanaRakhimovaShamiryan, DenisDenisShamiryanStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullartBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17409Effect of top power on a low-k film during oxygen strip in a TCP chamberJournal article