Development of a wet silicon removal process for replacement metal gate and sacrificial fin

Suhard, SamuelSamuelSuhardSebaai, FaridFaridSebaaiPacco, AntoineAntoinePaccoVeloso, AnabelaAnabelaVelosoCarbonell, LaureLaureCarbonellClaes, MartineMartineClaesStruyf, HerbertHerbertStruyfMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19851Development of a wet silicon removal process for replacement metal gate and sacrificial finProceedings paper