SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation

Ohashi, TakeyoshiTakeyoshiOhashiHasumi, KazuhisaKazuhisaHasumiMasami, IkotaIkotaMasamiLorusso, GianGianLorussoMertens, HansHansMertensWitters, LiesbethLiesbethWittersHoriguchi, NaotoNaotoHoriguchi2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33691SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling EvaluationOral presentation