Engineering Wafer-Scale Epitaxial Two-Dimensional Materials through Sapphire Template Screening for Advanced High-Performance Nanoelectronics

Shi, YuanyuanYuanyuanShiGroven, BenjaminBenjaminGrovenSerron, JillJillSerronWu, XiangyuXiangyuWuNalin Mehta, AnkitAnkitNalin MehtaMinj, AlbertAlbertMinjSergeant, StefanieStefanieSergeantHan, HanHanHanAsselberghs, IngeIngeAsselberghsLin, DennisDennisLinBrems, StevenStevenBremsHuyghebaert, CedricCedricHuyghebaertMorin, PierrePierreMorinRadu, IulianaIulianaRaduCaymax, MattyMattyCaymax2022-03-022022-03-0220211936-0851WOS:000665748900023https://imec-publications.be/handle/20.500.12860/39247Engineering Wafer-Scale Epitaxial Two-Dimensional Materials through Sapphire Template Screening for Advanced High-Performance NanoelectronicsJournal article10.1021/acsnano.0c07761WOS:000665748900023CHEMICAL-VAPOR-DEPOSITIONLARGE-AREA SYNTHESISSURFACE-MORPHOLOGYWSE2LAYERSCRYSTALLINENUCLEATIONGROWTHMONOLAYERSSUBSTRATEMEDLINE:34042437