Zhao, ChaoChaoZhaoRoebben, G.G.RoebbenBender, HugoHugoBenderYoung, EdwardEdwardYoungHaukka, S.S.HaukkaHoussa, MichelMichelHoussaNaili, MohamedMohamedNailiDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVan der Biest, O.O.Van der Biest2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5878In situ crystallisation in ZrO2 thin films during high temperature X-ray diffractionJournal article