Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithography

De Bisschop, PeterPeterDe BisschopHansen, Steven G.Steven G.Hansen2023-04-062022-10-292023-04-0620221932-5150WOS:000867486800005https://imec-publications.be/handle/20.500.12860/40632Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithographyJournal article10.1117/1.JMM.21.3.033201WOS:000867486800005LINE-EDGE ROUGHNESS