Line edge roughness and its increasing importance

Ercken, MoniqueMoniqueErckenStorms, GreetGreetStormsDelvaux, ChristieChristieDelvauxVandenbroeck, NadiaNadiaVandenbroeckLeunissen, PeterPeterLeunissenPollentier, IvanIvanPollentier2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6309Line edge roughness and its increasing importanceOral presentation