El Kazzi, SalimSalimEl KazziMortelmans, WouterWouterMortelmansNuytten, ThomasThomasNuyttenMeersschaut, JohanJohanMeersschautCarolan, PatrickPatrickCarolanLandeloos, LienLienLandeloosConard, ThierryThierryConardRadu, IulianaIulianaRaduHeyns, MarcMarcHeynsMerckling, ClementClementMerckling2021-10-252021-10-2520180021-8979https://imec-publications.be/handle/20.500.12860/30666MoS2 synthesis by Gas Source MBE for transition metal dichalcogenides integration on large scale substratesJournal articlehttps://aip.scitation.org/doi/10.1063/1.5008933