Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

Pacco, AntoineAntoinePaccoNakano, TeppeiTeppeiNakanoIwahata, ShotaShotaIwahataIwasaki, AkihisaAkihisaIwasakiAltamirano Sanchez, EfrainEfrainAltamirano Sanchez2023-07-042023-04-302023-07-0420230734-2101WOS:000960627700001https://imec-publications.be/handle/20.500.12860/41511Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolutionJournal article10.1116/6.0002404WOS:000960627700001CORROSION BEHAVIORMECHANISMCOPPERFILMS