Rampelberg, GeertGeertRampelbergDeduytsche, DavyDavyDeduytscheDe Schutter, BobBobDe SchutterPeter, AntonyAntonyPeterToeller, MichaelMichaelToellerSchaekers, MarcMarcSchaekersMartens, KoenKoenMartensRadu, IulianaIulianaRaduDetavernier, ChristopheChristopheDetavernier2021-10-222021-10-2220140040-6090https://imec-publications.be/handle/20.500.12860/24421Crystallization and semiconductor-metal switching behavior of thin VO2 layers grown by atomic layer depositionJournal articlehttp://www.sciencedirect.com/science/article/pii/S0040609013016404