Sioncke, SonjaSonjaSionckeLin, DennisDennisLinNyns, LauraLauraNynsBrammertz, GuyGuyBrammertzDelabie, AnneliesAnneliesDelabieConard, ThierryThierryConardFranquet, AlexisAlexisFranquetMeuris, MarcMarcMeurisStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsFleischmann, ClaudiaClaudiaFleischmannTemst, KristiaanKristiaanTemstVantomme, AndreAndreVantommeMuller, MatthiasMatthiasMullerKobe, MichaelMichaelKobeBeckhoff, BurkhardBurkhardBeckhoffCaymax, MattyMattyCaymax2021-10-192021-10-1920110013-4651https://imec-publications.be/handle/20.500.12860/19801Atomic layer deposition of high-k dielectrics on sulphur-passivated germaniumJournal article