LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION

Sattari, HamedHamedSattariTakabayashi, Alain Y.Alain Y.TakabayashiEdinger, PierrePierreEdingerVerheyen, PeterPeterVerheyenGylfason, Kristinn B.Kristinn B.GylfasonBogaerts, WimWimBogaertsQuack, NielsNielsQuack2022-03-162022-03-1620211084-6999WOS:000667731600072https://imec-publications.be/handle/20.500.12860/39451LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATIONProceedings paper10.1109/MEMS51782.2021.9375168978-1-6654-1912-3WOS:000667731600072