Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

Nag, ManojManojNagMuller, RobertRobertMullerSteudel, SoerenSoerenSteudelSmout, SteveSteveSmoutBhoolokam, AjayAjayBhoolokamMyny, KrisKrisMynySchols, SarahSarahScholsGenoe, JanJanGenoeCobb, BrianBrianCobbKumar, AbhishekAbhishekKumarGelinck, GerwinGerwinGelinckFukui, YusukeYusukeFukuiGroeseneken, GuidoGuidoGroesenekenHeremans, PaulPaulHeremans2021-10-222021-10-2220151598-0316https://imec-publications.be/handle/20.500.12860/25683Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTsJournal articlehttp://www.tandfonline.com/doi/abs/10.1080/15980316.2015.1043359#.VYLLAk0w99A