EUV scattering from carbon nanotube pellicles: measurement and control

Pollentier, IvanIvanPollentierLuttgenau, BernardBernardLuttgenauBrose, SaschaSaschaBroseTimmermans, MarinaMarinaTimmermansHuyghebaert, CedricCedricHuyghebaertBrems, StevenStevenBremsGallagher, EmilyEmilyGallagher2022-03-022022-03-0220211932-5150WOS:000670414000009https://imec-publications.be/handle/20.500.12860/39211EUV scattering from carbon nanotube pellicles: measurement and controlJournal article10.1117/1.JMM.20.2.021007WOS:000670414000009