X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafers

Loo, RogerRogerLooShimura, YosukeYosukeShimuraSun, JianwuJianwuSunIke, ShinichiShinichiIkeInuzuka, YuukiYuukiInuzukaNakatsuka, OsauOsauNakatsukaZaima, ShigeakiShigeakiZaimaImai, YasuhikoYasuhikoImaiKimura, ShigeruShigeruKimura2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25574X-ray microdiffraction measurements to support epitaxial growth studies of strained Ge-cap / relaxed SiGe on STI nano-scale patterned Si wafersBookhttps://user.spring8.or.jp/apps/experimentreport/detail/16607/en