Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymers

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloCraig, GordonGordonCraigGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-212021-10-2120130914-9244https://imec-publications.be/handle/20.500.12860/22995Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymersJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/26/6/26_831/_article