Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 program

Hendrickx, EricEricHendrickxGronheid, RoelRoelGronheidHermans, JanJanHermansLorusso, GianGianLorussoFoubert, PhilippePhilippeFoubertPollentier, IvanIvanPollentierGoethals, MiekeMiekeGoethalsJonckheere, RikRikJonckheereVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonse2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22473Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 programProceedings paper