Electrical characterization and special properties of FinFET structures

Rudenko, TamaraTamaraRudenkoKilchytska, ValeriaValeriaKilchytskaCollaert, NadineNadineCollaertNazarov, A.A.NazarovJurczak, GosiaGosiaJurczakFlandre, DenisDenisFlandre2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12819Electrical characterization and special properties of FinFET structuresProceedings paper