Strain characterization and simulation for MOSFETs with embedded source/drain stressors

Simoen, EddyEddySimoenEneman, GeertGeertEnemanFavia, PaolaPaolaFaviaBender, HugoHugoBenderVerheyen, PeterPeterVerheyenVincent, BenjaminBenjaminVincentHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooClaeys, CorCorClaeysBuhler, RudolfRudolfBuhlerMartino, JoaoJoaoMartinoBargallo Gonzalez, MireiaMireiaBargallo GonzalezThean, AaronAaronThean2021-10-222021-10-222014-04https://imec-publications.be/handle/20.500.12860/24527Strain characterization and simulation for MOSFETs with embedded source/drain stressorsProceedings paper