The band structure of ALCVD AlZr- and AlHf-oxides as measured by XPS

Petry, JasmineJasminePetryVandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConard2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9421The band structure of ALCVD AlZr- and AlHf-oxides as measured by XPSJournal article