Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium Nitride

McMitchell, SeanSeanMcMitchellWalke, AmeyAmeyWalkeBanerjee, KaustuvKaustuvBanerjeeMertens, SofieSofieMertensPiao, XiaoyuXiaoyuPiaoMao, MingMingMaoKatcko, KostantineKostantineKatckoVellianitis, GeorgiosGeorgiosVellianitisVan Dal, MarkMarkVan DalLin, Yu-MingYu-MingLinVan den Bosch, GeertGeertVan den BoschDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKar2023-07-242023-03-162023-07-062023-07-2420232637-6113WOS:000941425500001https://imec-publications.be/handle/20.500.12860/41287Engineering Strain and Texture in Ferroelectric Scandium-Doped Aluminium NitrideJournal article10.1021/acsaelm.2c01421WOS:000941425500001