Fabrication of CMOS compatible sub-micron nails for on-chip phagocytosis

Huys, RoelandRoelandHuysBartic, CarmenCarmenBarticVan Meerbergen, BartBartVan MeerbergenBraeken, DriesDriesBraekenLoo, JosineJosineLooWinters, KurtKurtWintersChen, ChangChangChenYitzchaik, S.S.YitzchaikSpira, M.M.SpiraShappir, J.J.ShappirBorghs, GustaafGustaafBorghs2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12325Fabrication of CMOS compatible sub-micron nails for on-chip phagocytosisProceedings paper