ALD La2O3 cap layers on high-k gates to modify the metal gate work function

Maes, JanJanMaesSwerts, JohanJohanSwertsTois, E.E.ToisDelabie, AnneliesAnneliesDelabieAdelmann, ChristophChristophAdelmannRagnarsson, Lars-AkeLars-AkeRagnarssonYu, HongYuHongYuYu2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12538ALD La2O3 cap layers on high-k gates to modify the metal gate work functionProceedings paper