Trenkler, ThomasThomasTrenklerDe Wolf, PeterPeterDe WolfStephenson, RobertRobertStephensonClarysse, TrudoTrudoClarysseHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/38892D profiling with atomic force microscopyOral presentation