Accurately extracting silicon waveguide dimensions from a single high-order Mach-Zehnder Interferometer

Liu, YichenYichenLiuKhan, UmarUmarKhanBogaerts, WimWimBogaerts2025-04-112025-04-112025-MAR 21094-4087WOS:001459591700002https://imec-publications.be/handle/20.500.12860/45518Accurately extracting silicon waveguide dimensions from a single high-order Mach-Zehnder InterferometerJournal article10.1364/OE.558406WOS:001459591700002PHOTONICS