Integration of high-Q resonators with MCM-D for millimeter wave applications

Ocket, IljaIljaOcketNauwelaers, BartBartNauwelaersCarchon, GeertGeertCarchonDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10944Integration of high-Q resonators with MCM-D for millimeter wave applicationsProceedings paper