Chiodarelli, NicoloNicoloChiodarelliLi, YunlongYunlongLiCott, DaireDaireCottMertens, SofieSofieMertensPeys, NickNickPeysHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18685Integration and electrical characterization of carbon nanotube via interconnectsJournal article