Barbagini, FrancescaFrancescaBarbaginiJanssens, TomTomJanssensBearda, TwanTwanBeardaArmini, SilviaSilviaArminiVan Hoeymissen, JanJanVan HoeymissenLe, Quoc ToanQuoc ToanLeMertens, PaulPaulMertensFransaer, JanJanFransaer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11693Particle removal from Si substrates in organic solvents using megasonic energyProceedings paper