Hauptmann, MarcMarcHauptmannStruyf, HerbertHerbertStruyfMertens, PaulPaulMertensHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGlorieux, ChristChristGlorieuxBrems, StevenStevenBrems2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20792The importance of control over bubble size distribution in pulsed megasonic cleaningProceedings paper