Low temperature investigation of n-channel GAA vertically stacked silicon nanosheets

Cretu, BogdanBogdanCretuVeloso, AnabelaAnabelaVelosoSimoen, EddyEddySimoen2022-09-012022-05-192022-09-0120212330-5738WOS:000790181800042https://imec-publications.be/handle/20.500.12860/39841Low temperature investigation of n-channel GAA vertically stacked silicon nanosheetsProceedings paper10.1109/EuroSOI-ULIS53016.2021.9560692978-1-6654-3745-5WOS:000790181800042LOW-FREQUENCY NOISE