Niroomand, ArdavanArdavanNiroomandGoethals, MiekeMiekeGoethalsVan Roey, FriedaFriedaVan RoeyKim, Byeong SooByeong SooKimLorusso, GianGianLorussoPollentier, IvanIvanPollentierJonckheere, RikRikJonckheereRonse, KurtKurtRonse2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12622EUV resist process development for full field imagingOral presentation