Kochupurackal, JineshJineshKochupurackalDam, Van AnhVan AnhDamSwerts, JohanJohanSwertsde Nooijer, ChristineChristinede NooijerVan Elshocht, SvenSvenVan ElshochtBrongersma, SywertSywertBrongersmaCrego-Calama, M.M.Crego-Calama2021-10-192021-10-1920110925-4005https://imec-publications.be/handle/20.500.12860/19189Room-temperature CO2 sensing using metal-insulator-semiconductor capacitors comprising atomic-layer-deposited La2O3 thin filmsJournal article