Wei, C.C.WeiSejpal, R.R.SejpalDeng, Y.Y.DengKusnadi, I.I.KusnadiFenger, G.G.FengerOya, M.M.OyaOkamoto, Y.Y.OkamotoMaruyama, K.K.MaruyamaYamazaki, Y.Y.YamazakiDas, SayantanSayantanDasHalder, SandipSandipHalderGillijns, WernerWernerGillijns2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36318Realizing more accurate OPC models by utilizing SEM contoursProceedings paperhttps://doi.org/10.1117/12.2554527