Philipsen, HaroldHaroldPhilipsenKim, YoujungYoujungKimYoo, BongyoungBongyoungYoo2024-09-192024-06-172024-09-1920240013-4686WOS:001243534000001https://imec-publications.be/handle/20.500.12860/44065Wet-chemical deposition of metals for advanced semiconductor technology nodes: Rh3+solution stability and Rh electrodepositionJournal article10.1016/j.electacta.2024.144331WOS:001243534000001ION-EXCHANGE CHROMATOGRAPHYHYDROGEN-EVOLUTION REACTIONSUPERCONFORMAL FILM GROWTHHYDROCHLORIC-ACID SOLUTIONPAPER ELECTROPHORESISRHODIUM(III) COMPLEXESCYCLIC VOLTAMMETRYNOBLE-METALSPOLYCRYSTALLINE RHODIUMSOLUTION CHEMISTRY