Applicability of HF solutions for contact hole cleaning on top of TiSi2

Baklanov, MikhaïlMikhaïlBaklanovKondoh, EiichiEiichiKondohVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2363Applicability of HF solutions for contact hole cleaning on top of TiSi2Proceedings paper