Schuhmacher, JörgJörgSchuhmacherTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerLi, YunlongYunlongLiStokhof, MaartenMaartenStokhofSchaekers, MarcMarcSchaekersMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8126Process and properties of ALD tungsten nitride carbide barrier films for interconnectsOral presentation