Anomalously weak antenna ratio dependence of plasma process-induced damage

Van den Bosch, GeertGeertVan den BoschCreusen, MartinMartinCreusenDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4815Anomalously weak antenna ratio dependence of plasma process-induced damageProceedings paper