Trends in metallization and interconnection – Results of the survey conducted during the 8th Metallization and Interconnection Workshop

Schubert, G.G.SchubertBeaucarne, GuyGuyBeaucarneTous, LoicLoicTousHoornstra, J.J.Hoornstra2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33955Trends in metallization and interconnection – Results of the survey conducted during the 8th Metallization and Interconnection WorkshopProceedings paperhttps://doi.org/10.1063/1.5125867