Trauwaert, Marie-AstridMarie-AstridTrauwaertVanhellemont, JanJanVanhellemontMaes, HermanHermanMaesVan Bavel, MiekeMiekeVan BavelLangouche, G.G.LangoucheStesmans, AndreAndreStesmansClauws, P.P.Clauws2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/914Low temperature anneal of the divacancy in p-type siliconProceedings paper