Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films

Amanapu, HariprasadHariprasadAmanapuSagi, KaushikKaushikSagiTeugels, LieveLieveTeugelsBabu, S.V.S.V.Babu2021-10-212021-10-2120132162-8769https://imec-publications.be/handle/20.500.12860/21974Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium filmsJournal articlehttp://jss.ecsdl.org/content/2/11/P445.full.pdf+html