Wafer scale processing of plasmonic nanoslit arrays in 200mm CMOS fab environment

Malachowski, KarlKarlMalachowskiVerbeeck, RitaRitaVerbeeckDupont, TaniaTaniaDupontChen, ChangChangChenLi, YiYiLiMusa, SilkeSilkeMusaStakenborg, TimTimStakenborgSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanVan Dorpe, PolPolVan Dorpe2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21083Wafer scale processing of plasmonic nanoslit arrays in 200mm CMOS fab environmentProceedings paper