Thin SiGe films in narrow structures: comparison of different analysis techniques for the thickness and composition measurements

Franquet, AlexisAlexisFranquetConard, ThierryThierryConardGilbert, MatthieuMatthieuGilbertDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20693Thin SiGe films in narrow structures: comparison of different analysis techniques for the thickness and composition measurementsMeeting abstract